Direct evidence of self-aligned Si nanocrystals formed by ion irradiation of Si/SiO 2 interfaces

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 15, 2005, Pages

  Röntzsch, Lars ^a   Heinig, Karl Heinz ^a   Schmidt, Bernd ^a   Mücklich, Arndt ^a   Möller, Wolfhard ^a   Thomas, Jürgen ^b   Gemming, Thomas ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ION IRRADIATION; POST-IRRADIATION ANNEALING; ATOMISTIC COMPUTER SIMULATION; ENERGY FILTERED TRANSMISSION ELECTRON MICROSCOPY; MONO-DISPERSE; POSTIRRADIATION ANNEALING; SELF-ALIGNED; SI NANOCRYSTAL;

ANNEALING; COMPUTER SIMULATION; IRRADIATION; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

NANOSTRUCTURED MATERIALS; SILICON;

EID: 29744455657     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200521399     Document Type: Article

References (24)

1. M. Reimann and M. Manninen, Rev. Mod. Phys. 74, 1283 (2002).
2. S. Tiwari, J. A. Wahl, H. Silva, F. Rana, and J. J. Welser, Appl. Phys. A 71, 403 (2000).
3. R. Waser (Ed.), Nanoelectronics and information technology (Wiley-VCH, Weinheim, 2003).
4. S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, E. F. Crabbe, and K. Chan, Appl. Phys. Lett. 68, 1377 (1996).
5. J. U. Schmidt and B. Schmidt, Mater. Sci. Eng. B 101, 28 (2003).
6. M. Ostraat, J. D. Blauwe, M. Green, L. Bell, M. Brongersma, J. Casperson, R. Flagan, and H. Atwater, Appl. Phys. Lett. 79, 433 (2001).
7. E. Kapetanakis, P. Normand, D. Tsoukalas, and K. Beltsios, Appl. Phys. Lett. 80, 2794 (2002).
8. T. Müller, K.-H. Heinig, and W. Möller, Appl. Phys. Lett. 81, 3049 (2002).
9. B. Schmidt, D. Grambole, and F. Herrmann, Nucl. Instrum. Methods B 191, 482 (2002).
10. T. Müller, K.-H. Heinig, W. Möller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, Z. Zanchi, A. Claverie, M. Tence, and C. Colliex, Appl. Phys. Lett. 85, 2373 (2004).
11. K.-H. Heinig, B. Schmidt, M. Strobel, and H. Bernas, Mater. Res. Soc. Symp. Proc. 647, O14.6 (2001).
12. K.-H. Heinig, T. Müller, B. Schmidt, M. Strobel, and W. Möller, Appl. Phys. A 77, 17 (2003).
13. M. Klimenkov (2002), private communication.
14. M. Perego and M. Fanciulli (2003), private communication.
15. L. Röntzsch, K.-H. Heinig and B. Schmidt, Mater. Sci. Semicond. Proc. 7, 357 (2004).
16. B. Schmidt, K.-H. Heinig, L. Röntzsch, T. Müller, K.-H. Stegemann, and E. Votintseva, Nucl. Instrum. Methods B (2005), in press.
17. W. Möller and W. Eckstein, Nucl. Instrum. Methods B 2, 814 (1984).
18. J. Ziegler, J. Biersack, and U. Littmark, The Stopping of Ions in Matter (Pergamon, New York, 1985); TRIM-98 code (http://www.srim.org).
19. M. Strobel, K.-H. Heinig, and W. Möller, Phys. Rev. B 64, 245422 (2001).
20. S. Nakashima and K. Izumi, J. Mater. Res. 8, 523 (1993).
21. M. Uematsu, H. Kageshima, Y. Takahashi, S. Fukatsu, K. M. Itoh, K. Shiraishi, and U. Gösele, Appl. Phys. Lett. 84, 876 (2004), and references therein.
22. G. B. Assayag, C. Bonafos, M. Carrada, A. Claverie, P. Normand, and D. Tsoukalas, Appl. Phys. Lett. 82, 200 (2003).
23. F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli, and F. Priolo, J. Appl. Phys. 95, 3723 (2004).
24. B. Schmidt and K.-H. Heinig, unpublished results.