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Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 776-779
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Bias enhanced sensitivity in amorphous/porous silicon heterojunction gas sensors
a
ENEA CR Portici
(Italy)
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTALLIZATION;
CURRENT DENSITY;
ELECTROCHEMISTRY;
ETCHING;
HETEROJUNCTIONS;
OHMIC CONTACTS;
PHOTOLUMINESCENCE;
SILICON;
THICKNESS MEASUREMENT;
THIN FILMS;
ULTRAVIOLET LAMPS;
CLIMATIC CHAMBERS;
GAS EXPOSURE;
MASS FLOW CONTROL (MFC);
SILICON SUBSTRATES;
CHEMICAL SENSORS;
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EID: 2942618522
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2004.03.089 Document Type: Conference Paper |
Times cited : (14)
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References (13)
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