CF4/O2 dry etching of textured crystalline silicon surface in a-Si:H/c-Si heterojunction for photovoltaic applications

Solar Energy Materials and Solar Cells

Volumn 69, Issue 2, 2001, Pages 175-185

  Tucci, M ^a   De Rosa, R ^a   Roca, F ^a  

^a ENEA CR Portici   (Italy)

Author keywords

Amorphous silicon; Dry etching; Heterojunction

Indexed keywords

AMORPHOUS SILICON; DRY ETCHING; HETEROJUNCTIONS; SURFACE CLEANING; TEXTURES;

AMORPHOUS LAYER DEPOSITION;

SILICON SOLAR CELLS;

EID: 0035452847     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(00)00409-8     Document Type: Article

References (11)