Laterally deformable nanomechanical zeroth-order gratings: Anomalous diffraction studied by rigorous coupled-wave analysis

Optics Letters

Volumn 28, Issue 18, 2003, Pages 1636-1638

  Carr, Dustin W ^a   Sullivan, J P ^a   Friedmann, T A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT POLARIZATION; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; RESONANCE;

INCIDENT LIGHT;

DIFFRACTION GRATINGS;

EID: 0141865628     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.28.001636     Document Type: Article

References (12)

1. O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, Opt. Lett. 17, 688 (1992).
2. F. S. A. Sandejas, R. B. Apte, W. C. Banyai, and D. M. Bloom, in Proceedings of the Seventh International Conference on Solid-State Sensors and Actuators (Transducer Research Foundation, Cleveland Heights, Ohio, 1994), p. 1.
3. M. G. Moharam, E. B. Grann, D. A. Pommett, and T. K. Gaylord, J. Opt. Soc. Am. A 12, 1068 (1995).
4. H. Haidner, J. T. Sheridan, J. Schwider, and N. Streibl, Opt. Commun. 98, 5 (1993).
5. M. G. Moharam, E. B. Grann, D. A. Pommett, and T. K. Gaylord, J. Opt. Soc. Am. A 12, 1077 (1995).
6. T. Peter, R. Brauer, and O. Bryngdahl, Opt. Commun. 139, 177 (1997).
7. T. Tamir and S. Zhang, J. Opt. Soc. Am. A 14, 1607 (1997).
8. A. Hessel and A. A. Oliner, Appl. Opt. 4, 1275 (1965).
9. C.-H. Liu and T. W. Kenny, J. Microelectromech. Syst. 10, 425 (2001).
10. R. L. Waters and M. E. Aklufi, Appl. Phys. Lett. 81, 3320 (2002).
11. D. W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 75, 920 (1999).
12. D. W. Carr and H. G. Craighead, J. Vac. Sci. Technol. B 15, 2760 (1997).