Surface anisotropy characterization and microstructure of Cu-W thin films at different annealing temperatures

Physica B: Condensed Matter

Volumn 349, Issue 1-4, 2004, Pages 10-18

  Yuan, Wang ^a,b   Xuanyu, Bai ^a   Kewei, Xu ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b LANZHOU JIAOTONG UNIVERSITY   (China)

Author keywords

Cu W thin films; Mathematical analysis; Phase structure; Surface morphology

Indexed keywords

ALUMINA; ANISOTROPY; ANNEALING; FRACTALS; GRAIN BOUNDARIES; MAGNETRON SPUTTERING; MICROSTRUCTURE; PHASE TRANSITIONS; SCANNING ELECTRON MICROSCOPY; SURFACE PHENOMENA; SURFACES; THIN FILMS; TUNGSTEN; WAVELET TRANSFORMS;

DISCRETE WAVELET TRANSFORM (DWT); MATHEMATICAL ANALYSIS; PHASE STRUCTURES; SURFACE ANISOTROPY;

COPPER COMPOUNDS;

EID: 2942575051     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2004.01.146     Document Type: Article

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