Creation of metastable defects in microcrystalline silicon films by keV electron irradiation

Journal of Non-Crystalline Solids

Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 378-381

  Chukichev, M V ^a   Forsh, P A ^a   Fuhs, W ^b   Kazanskii, A G ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; AMORPHOUS SILICON; ANNEALING; CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PROCESS); ELECTRIC CONDUCTIVITY; ELECTRON CYCLOTRON RESONANCE; ELECTRON IRRADIATION; LIGHT ABSORPTION; PHOTOCONDUCTIVITY; QUARTZ; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

DANGLING BONDS; EXCITATION GASES; METASTABLE DEFECTS; MONOCHROMATIC ILLUMINATIONS;

CRYSTALLINE MATERIALS;

EID: 2942562352     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.03.001     Document Type: Conference Paper

References (15)

1. Liu H., Xu M. Solid State Commun. 58:1986;601.
2. St'ahel P., Hamma S., Sladek P., Roca i Cabarrocas P. J. Non-Cryst. Solids. 227-230:1998;276.
3. Schneider U., Schröder B. Fritzsche H. Amorphous Silicon and Related Materials. 1988;687 World Scientific, Singapore.
4. Bronner W., Mehring M., Brüggemann R. Phys. Rev. B. 65:2002;165212-1.
5. Brüggemann R., Bronner W., Mehring M. Solid State Commun. 119:2001;23.
6. Bronner W., Kleider J.P., Brüggemann R., Mehring M. Thin Solid Films. 427:2003;51.
7. Lips K., Kanschat P., Fuhs W. Solar Energy Mater. Solar Cells. 78:2003;513.
8. Beck N., Meier J., Fric J., Remes Z., Poruba A., Fluckiger R., Pohl J., Shah A., Vanecek M. J. Non-Cryst. Solids. 198-200:1996;903.
9. Kazanskii A.G., Korol A.S., Milichevich E.P., Chukichev M.V. Sov. Phys. Semicond. 20:1986;1000.
10. Poruba A., Vanecek M., Meier J., Shah A. J. Non-Cryst. Solids. 299-302:2002;536.
11. Bronner W., Brüggemann R., Mehring M. J. Non-Cryst. Solids. 266-269:2000;534.
12. Schneider U., Schröder B., Finger F. J. Non-Cryst. Solids. 114:1989;633.
13. Zhou J.H., Yamasaki S., Isoya J., Ikuta K., Kondo M., Matsuda A., Tanaka K. Mat. Res. Soc. Symp. Proc. 452:1997;821.
14. C. Böhme, Dissertation Universität Marburg, 2002 (Cuvillier Verlag, Göttingen 2003).
15. M. Stutzmann, in: J. Kanicki (Ed.), Amorphous and Microcrystalline Semiconductor Devices, vol. 2, Artech House, Boston, MA, 1991, p. 129.