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Volumn 26, Issue SUPPL., 2005, Pages 277-280

Annealing effect on Cu/, Ni/4H-SiC Schottky barrier

Author keywords

4H SiC; Annealing; Schottky barrier height

Indexed keywords

ANNEALING; COPPER; CURRENT VOLTAGE CHARACTERISTICS; INTERFACES (MATERIALS); LEAKAGE CURRENTS; MAGNETRON SPUTTERING; MEASUREMENTS; NICKEL; SILICON CARBIDE; TEMPERATURE;

EID: 29144535639     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (5)

References (11)
  • 1
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    • High-voltage Ni- and Pt- SiC Schottky diodes utilizing metal field plate termination
    • Saxena V, Su J N.Steckl A J. High-voltage Ni- and Pt- SiC Schottky diodes utilizing metal field plate termination. IEEE Trans Electron Devices, 1999, 46(3): 456
    • (1999) IEEE Trans Electron Devices , vol.46 , Issue.3 , pp. 456
    • Saxena, V.1    Su, J.N.2    Steckl, A.J.3
  • 3
    • 0032659440 scopus 로고    scopus 로고
    • Electrical characterization of inhomogeneous Ti/4H-SiC Schottky contacts
    • Defives D, Noblanc O, Dua C, et al. Electrical characterization of inhomogeneous Ti/4H-SiC Schottky contacts. Mater Sci Eng B, 1999, 61/62: 395
    • (1999) Mater Sci Eng B , vol.61-62 , pp. 395
    • Defives, D.1    Noblanc, O.2    Dua, C.3
  • 6
    • 0036435433 scopus 로고    scopus 로고
    • Electrical properties and interface reaction of annealed Cu/4H-SiC Schottky rectifiers
    • Hatayama T, Kawahito K, Kijima H, et al. Electrical properties and interface reaction of annealed Cu/4H-SiC Schottky rectifiers. Materials Science Forum, 2002, 389-393: 925
    • (2002) Materials Science Forum , vol.389-393 , pp. 925
    • Hatayama, T.1    Kawahito, K.2    Kijima, H.3
  • 7
    • 0036508332 scopus 로고    scopus 로고
    • Influence of annealing on reverse current of 4H-SiC Schottky diodes
    • Mariusz S, Szmidt J, Werbowy A, et al. Influence of annealing on reverse current of 4H-SiC Schottky diodes. Diamond and Related Materials, 2002, 11: 1263
    • (2002) Diamond and Related Materials , vol.11 , pp. 1263
    • Mariusz, S.1    Szmidt, J.2    Werbowy, A.3
  • 8
    • 0035852239 scopus 로고    scopus 로고
    • Contact formation in SiC devices
    • Pécz B. Contact formation in SiC devices. Appl Surf Sci, 2001, 184: 287
    • (2001) Appl Surf Sci , vol.184 , pp. 287
    • Pécz, B.1
  • 9
    • 0017556846 scopus 로고
    • The work function of the elements and its periodicity
    • Michaelson H B. The work function of the elements and its periodicity. J Appl Phys, 1977, 48(11): 4729
    • (1977) J Appl Phys , vol.48 , Issue.11 , pp. 4729
    • Michaelson, H.B.1
  • 10
    • 0031186813 scopus 로고    scopus 로고
    • Analysis of Schottky barrier heights of metal/SiC contacts and its possible application to high-voltage rectifying devices
    • Itoh A, Matsunami H. Analysis of Schottky barrier heights of metal/SiC contacts and its possible application to high-voltage rectifying devices. Phys Status Solidi A, 1997, 162: 389
    • (1997) Phys Status Solidi A , vol.162 , pp. 389
    • Itoh, A.1    Matsunami, H.2
  • 11
    • 0035436236 scopus 로고    scopus 로고
    • High-voltage Ti/6H-SiC Schottky barrier diodes
    • Wang Shurui, Liu Zhongli, Li Guohua, et al. High-voltage Ti/6H-SiC Schottky barrier diodes. Chinese Journal of Semiconductors, 2001, 22(8): 962
    • (2001) Chinese Journal of Semiconductors , vol.22 , Issue.8 , pp. 962
    • Wang, S.1    Liu, Z.2    Li, G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.