A time dependent propagator method for long mean free path transport of neutral particles in plasma processing reactors

Journal of Applied Physics

Volumn 79, Issue 7, 1996, Pages 3423-3431

  Tan, Wen Yi ^a   Hoekstra, Robert J ^a   Kushner, Mark J ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005816564     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361389     Document Type: Article

References (16)

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