Electrical properties of PZT-PCW thick film on Pt/Sic/Si, and structural stability of SiC

Integrated Ferroelectrics

Volumn 69, Issue , 2005, Pages 93-101

  Choi, Ki Yong ^a,b   Choi, Duck Kyun ^a,b   Park, Ji Yeun ^c   Yoon, Dae Sung ^a   Kim, Tae Song ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Hanyang University   (South Korea)

^c KAERI ^*  (South Korea)

Author keywords

MEMS; Piezoelectric; PZT; SiC; Thick film

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; PLATINUM COMPOUNDS; SILICON CARBIDE; SINTERING; TITANIUM DIOXIDE;

PZT-PCW THICK FILM; REMANENT POLARIZATION; STRUCTURAL STABILITY; THERMAL CVD METHOD;

THICK FILMS;

EID: 29144475845     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580590897335     Document Type: Conference Paper

References (7)

1. M. Meregany and C. A. Zorman, Thin Solid Films 355/356, 518 (1999).
2. P. M. Sarro, Sen. Actuators A 82, 210 (2000).
3. S. Sriram, R. C. Clarke, A. A. Burk, Jr., H. M. Hobgood, P. G. McMullin, P. A. Orphanos, R. R. Siergiej, T.J. Smit, C. D. Brandt, M. C. Driver, and R. H. Hopkins, IEEE Electron Device Lett. EDL-15, 458 (1994).
4. N. Susumu, A. Sadao, Jpn. J. Appl. Phys. 33, 1833 (1994).
5. H. S. Kong, J. W. Palmour, J. T. Glass, and R. F. Davis, Appl. Phys. Lett. 51, 442 (1987).
6. Y. B. Kim, H. J. Kim, C. I. Cheon, D. J. Choi, and T. S. Kim, Integrated Ferroelectric 41, 107-116 (2001).
7. R. J. Iwanowski, K. Fronc, W. Paszkowicz, and M. Heinonen, J. Alloys & Compounds 286, 143 (1999).