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Volumn 23, Issue 6, 2005, Pages 2763-2768
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Negative charging-up contrast formation of multilayered structures with a nonpenetrating electron beam in scanning-electron microscope
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CURRENTS;
ELECTRON BEAMS;
ELECTRON MICROSCOPES;
INSULATING MATERIALS;
IRRADIATION;
SCANNING;
CONTRAST-FORMATION MECHANISM;
MULTILAYERED STRUCTURES;
SURFACE POTENTIAL DISTRIBUTION;
TERTIARY ELECTRONS;
OPTICAL MULTILAYERS;
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EID: 29044446336
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.2101757 Document Type: Article |
Times cited : (21)
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References (18)
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