Contrast mechanism of negatively charged insulators in scanning electron microscope

Journal of Electron Microscopy

Volumn 47, Issue 2, 1998, Pages 143-147

  Ura, Katsumi ^a  

^a OSAKA SANGYO UNIVERSITY   (Japan)

Author keywords

EBIC and space charge conduction of electrons in an insulator; Negative charging of insulator; Redistribution and multiplication of secondary electrons; Surface potential distribution and voltage contrast

Indexed keywords

ELECTRIC SPACE CHARGE; ELECTRONS; SURFACE POTENTIAL;

CHARGE CONDUCTION; EBIC AND SPACE CHARGE CONDUCTION OF ELERTRONS IN AN INSULATOR; NEGATIVE CHARGING; NEGATIVE CHARGING OF INSULATOR; POTENTIAL VOLTAGE; REDISTRIBUTION AND MULTIPLICATION OF SECONDARY ELECTRON; SECONDARY ELECTRONS; SURFACE POTENTIAL DISTRIBUTION AND VOLTAGE CONTRAST; SURFACE POTENTIAL DISTRIBUTIONS; VOLTAGE CONTRAST;

SCANNING ELECTRON MICROSCOPY;

EID: 0031874031     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/oxfordjournals.jmicro.a023571     Document Type: Article

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