Structure and resonant characteristics of amorphous carbon pillars grown by focused-ion-beam-induced chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 B, 2002, Pages 4423-4426

  Fujita, Jun Ichi ^a   Ishida, Masahiko ^a   Ichihashi, Toshinari ^b   Sakamoto, Toshitsugu ^c   Ochiai, Yukinori ^a   Kaito, Takashi ^a   Matsui, Shinji ^b  

^a NEC CORPORATION   (Japan)

^b SEIKO INSTRUMENTS INC   (Japan)

^c UNIVERSITY OF HYOGO   (Japan)

Author keywords

Amorphous carbon; Focused ion beam; Resonance; Young's modulus

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; GROWTH (MATERIALS); ION BEAMS; SEMICONDUCTING GALLIUM; TRANSMISSION ELECTRON MICROSCOPY; VIBRATIONS (MECHANICAL);

AMORPHOUS CARBON PILLARS; FOCUSED ION BEAMS (FIB);

CARBON;

EID: 0036614013     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4423     Document Type: Article

References (7)