Transient mechanical and electrical properties of uncooled resistive microbolometer focal plane arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5564, Issue , 2004, Pages 123-132

  Li, Biao ^a   Huang, Shusen ^a   Zhang, Xin ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

Configuration; Finite element modeling; Focal plane array; Resistive microbolometer; Stress; Thermal expansion

Indexed keywords

COMPRESSIVE STRESS; CRYSTALLIZATION; ELASTIC MODULI; ELECTRIC PROPERTIES; FINITE ELEMENT METHOD; GRAIN BOUNDARIES; HEAT RESISTANCE; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; THERMAL EXPANSION;

CONFIGURATION; FOCAL PLANE ARRAYS; RESISTIVE MICROBOLOMETER; TRANSIENT MECHANICAL;

BOLOMETERS;

EID: 15944384279     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.562063     Document Type: Conference Paper

References (12)

1. R. A. Wood, in Paul W. Kruse and David D. Skatrud (ed) Uncooled infrared imaging arrays and systems, Semiconductors and Semimetals, Vol 47, 1997.
2. Biao Li, Design and simulation of an uncooled double cantilever microbolometer with the potential for ∼mK NETD, Sensors & Actuators, A112, (2004) 351
3. T. R. Schimert et al, Low-power uncooled 120×160 a-Si-based micro infrared camera for unattended ground sensor applications, Proc. SPIE Vol. 4040 (2000) 23
4. W. Radford et al, Microbolometer uncooled infrared camera with 20-mK NETD, Proc. SPIE Vol. 3436, (1998) 636
5. 4 bridges, IEEE Journal of Microelectromechanical Systems, 8 (1999) 192
6. M. Almasri, D. P. Butler, and Z. Çelik-Butler, Self support uncooled infrared microbolometers with low-thermal mass, IEEE Journal of Microelectromechanical Systems, 10 (2001) 469
7. C. Hsieh, C. Wu, F Jih and T. Sun, Focal-plane-arrays and CMOS readout techniques of infrared imaging systems, IEEE Transactions on circuit and systems for video technology, 7 (594) 1997
8. K. Liddiard, U. Ringh, C. Jansson, Staring focal plane arrays for advanced ambient temperature infrared sensors, Proc. SPIE Vol. 2552 (1995) 564
9. D. Jakonis, C. Svensson, C. Jansson, Readout architechtures for uncooled IR detector arrays, Sensors and Actuators, A84 (2000) 220
10. William J. Parish, James T. Woolaway, Glen Kincaid, Jeffery L. Heath, Jeffrey D. Frank, Low cost 160×128 uncooled infrared sensor array, Proc. SPIE, Vol. 3360 (1998)
11. D. Tanner, J. Walraven, K. Helgesen, L. Irwin, D. Gregory, J. Stake, and N. Smith, MEMS reliability in a vibration environment, IEEE International Reliability Physics Symposium, San Jose, CA, April, 2000, PP. 139-145
12. M. Huang and Z. Suo, Q. Ma and H. Fujimoto, Thin film cracking and ratcheting caused by temperature cycling, J. Mater. Res., 15, (2000) 1239