Novel silicon-on-insulator structures for reduced self-heating effects

IEEE Circuits and Systems Magazine

Volumn 5, Issue 4, 2005, Pages 18-29

  Chu, Paul K ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Aluminum nitride (AIN); Diamond like carbon (DLC); Numerical simulation; Self heating effect; Silicon on insulator (SOI)

Indexed keywords

ALUMINUM NITRIDE (ALN); SELF-HEATING EFFECT;

ALUMINUM COMPOUNDS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DIAMOND LIKE CARBON FILMS; NUMERICAL ANALYSIS; SILICA;

SILICON ON INSULATOR TECHNOLOGY;

EID: 28844497070     PISSN: 1531636X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MCAS.2005.1550166     Document Type: Article

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