메뉴 건너뛰기
Optics Express
Volumn 11, Issue 8, 2003, Pages 952-957
Wide band interferometry for thickness measurement
Author keywords

[No Author keywords available]
Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; BANDWIDTH; DISPERSION (WAVES); FAST FOURIER TRANSFORMS; FREQUENCY MODULATION; OPTICAL GLASS; OPTICAL TESTING; REFRACTIVE INDEX; STATISTICAL METHODS; THICKNESS MEASUREMENT; THIN FILMS;
EID: 2942707931     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.11.000952     Document Type: Article
Times cited : (30)
References (11)
  • 1
    • 0001363526 scopus 로고    scopus 로고
    • Improved vertical scanning interferometry
    • A. Harasaki, J. Schmit and J. C. Wyant, "Improved vertical scanning interferometry," Appl. Opt. 39, 2107-2115 (2000)
    • (2000) Appl. Opt. , vol.39 , pp. 2107-2115
    • Harasaki, A.1    Schmit, J.2    Wyant, J.C.3
  • 2
    • 77955701859 scopus 로고
    • Derivation algorithms for phase-shifting interferometry using the concept of a data-sampling window
    • P. de Groot, "Derivation algorithms for phase-shifting interferometry using the concept of a data-sampling window," Appl. Opt. 34, 4723-4730 (1995)
    • (1995) Appl. Opt. , vol.34 , pp. 4723-4730
    • De Groot, P.1
  • 3
    • 0028545665 scopus 로고
    • High-speed noncontact profiler based on scanning white-light interferometry
    • L. Deck and P. de Groot, "High-speed noncontact profiler based on scanning white-light interferometry," Appl. Opt. 33, 7334-7338 (1994)
    • (1994) Appl. Opt. , vol.33 , pp. 7334-7338
    • Deck, L.1    De Groot, P.2
  • 4
    • 0032047788 scopus 로고    scopus 로고
    • Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy
    • M. Hart, D. G. Vass and M. L. Begbie, "Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy," Appl. Opt. 37, 1764-1769 (1998)
    • (1998) Appl. Opt. , vol.37 , pp. 1764-1769
    • Hart, M.1    Vass, D.G.2    Begbie, M.L.3
  • 5
    • 0027639146 scopus 로고
    • Interferometric profiler for rough surfaces
    • P. J. Caber, "Interferometric profiler for rough surfaces," Appl. Opt. 32, 438-3441 (1993)
    • (1993) Appl. Opt. , vol.32 , pp. 438-3441
    • Caber, P.J.1
  • 6
    • 0000137961 scopus 로고    scopus 로고
    • Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry
    • P. Sandoz, R. Devillers and A. Plata, "Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry," J. Mod. Opt. 44, 519-534 (1997)
    • (1997) J. Mod. Opt. , vol.44 , pp. 519-534
    • Sandoz, P.1    Devillers, R.2    Plata, A.3
  • 8
    • 0036867624 scopus 로고    scopus 로고
    • Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acusto-optic tunable filter
    • D. Kim, S. Kim, H. J. Kong and Y. Lee, "Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acusto-optic tunable filter," Opt. Lett. 27, 1893-1895 (2002)
    • (2002) Opt. Lett. , vol.27 , pp. 1893-1895
    • Kim, D.1    Kim, S.2    Kong, H.J.3    Lee, Y.4
  • 9
    • 0028479462 scopus 로고
    • Dispersive interferometric profilometer
    • J. Schwider and L. Zhou, "Dispersive interferometric profilometer," Opt. Lett. 19, 995-997 (1994)
    • (1994) Opt. Lett. , vol.19 , pp. 995-997
    • Schwider, J.1    Zhou, L.2
  • 10
    • 0010538283 scopus 로고
    • Surface profiling by means of double spectral modulation
    • J. E. Calatroni, P. Sandoz and Gilbert Tribillon, "Surface profiling by means of double spectral modulation," Appl. Opt. 32, 30-36 (1993)
    • (1993) Appl. Opt. , vol.32 , pp. 30-36
    • Calatroni, J.E.1    Sandoz, P.2    Tribillon, G.3

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.