Determining pore structure and growth mechanisms in templated nanoporous low-k Films

Materials Research Society Symposium Proceedings

Volumn 863, Issue , 2005, Pages 55-60

  Peng, Hua Gen ^a   Vallery, Richard S ^a   Liu, Ming ^a   Frieze, William E ^a   Gidley, David W ^a   Yim, Jinheong ^b   Jeong, Hyun Dam ^c   Kim, Jongmin ^c  

^a UNIVERSITY OF MICHIGAN   (United States)

^b Kongju National University   (South Korea)

^c Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; NANOSTRUCTURED MATERIALS; PORE SIZE; POROSITY; POSITRON ANNIHILATION SPECTROSCOPY;

PORE SIZE GROWTH; PORE STRUCTURE; POSITRON ANNIHILATION LIFETIME SPECTROSCOPY (PALS);

DIELECTRIC FILMS;

EID: 28844433116     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-863-b3.4     Document Type: Conference Paper

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