-
1
-
-
0035905252
-
Local lattice strain distribution around a transistor channel in metal-oxide-semiconductor devices
-
A. Toda, N. Ikarashi, H. Ono, S. Ito, T. Toda, and K. Imai, "Local lattice strain distribution around a transistor channel in metal-oxide- semiconductor devices," Applied Physics Letters Vol. 79, No. 25, 2001, pp. 4243-4245.
-
(2001)
Applied Physics Letters
, vol.79
, Issue.25
, pp. 4243-4245
-
-
Toda, A.1
Ikarashi, N.2
Ono, H.3
Ito, S.4
Toda, T.5
Imai, K.6
-
2
-
-
8344236776
-
A 90-nm logic technology featuring strained-silicon
-
S. E. Thompson, M. Armstrong, C. Auth, M. Alavi, M. Buehler, R. Chau, S. Cea, T. Ghani, G. Glass, T. Hoffman, C. H. Jan, C. Keyon, J. Klaus, K. Kuhn, Z. Ma, B. Mcintyre, K. Mistry, A. Murthy, B. Obradovic, R. Nagisetty, P. Nguyen, S. Sivakumar, R. Shaheed, L. Shifren, B. Tufts, S, Tyagi, M. Bohr, and Y. El-Mansy, "A 90-nm Logic Technology Featuring Strained-Silicon," IEEE Transactions of Electron Devices Vol. 51, No. 11, 2004, pp. 1790-1797.
-
(2004)
IEEE Transactions of Electron Devices
, vol.51
, Issue.11
, pp. 1790-1797
-
-
Thompson, S.E.1
Armstrong, M.2
Auth, C.3
Alavi, M.4
Buehler, M.5
Chau, R.6
Cea, S.7
Ghani, T.8
Glass, G.9
Hoffman, T.10
Jan, C.H.11
Keyon, C.12
Klaus, J.13
Kuhn, K.14
Ma, Z.15
Mcintyre, B.16
Mistry, K.17
Murthy, A.18
Obradovic, B.19
Nagisetty, R.20
Nguyen, P.21
Sivakumar, S.22
Shaheed, R.23
Shifren, L.24
Tufts, B.25
Tyagi, S.26
Bohr, M.27
El-Mansy, Y.28
more..
-
3
-
-
0036923302
-
Novel shallow trench isolation process using flowable oxide CVD for sub-100nm DRAM
-
S. W. Chung, S. T. Ahn, H. C. Sohn, J. Ku, S. Park, Y. W. Song, H. K. Park, and S. D. Lee, "Novel shallow trench isolation process using flowable oxide CVD for sub-100nm DRAM," in Technical Digest of the 2002 International Electron Device Meeting, 2002, pp. 233-236.
-
(2002)
Technical Digest of the 2002 International Electron Device Meeting
, pp. 233-236
-
-
Chung, S.W.1
Ahn, S.T.2
Sohn, H.C.3
Ku, J.4
Park, S.5
Song, Y.W.6
Park, H.K.7
Lee, S.D.8
-
4
-
-
0035716633
-
The mechanical stress effects on data retention reliability of NOR flash memory
-
Y. M. Park, J. S. Lee, M. Kim, M. K. Choi, T. K. Kim, J. I. Han, D. W. Kwon, W. K. Lee, Y. H. Song, and K. D. Suh, "The Mechanical Stress Effects on Data Retention Reliability of NOR Flash Memory," in Technical Digest of the 2001 International Electron Device Meeting, 2001, pp. 711-714.
-
(2001)
Technical Digest of the 2001 International Electron Device Meeting
, pp. 711-714
-
-
Park, Y.M.1
Lee, J.S.2
Kim, M.3
Choi, M.K.4
Kim, T.K.5
Han, J.I.6
Kwon, D.W.7
Lee, W.K.8
Song, Y.H.9
Suh, K.D.10
-
5
-
-
2342522065
-
Effects of interface trap generation and annihilation of the data retention characteristics of flash memory cells
-
J. D. Lee, J. H. Choi, D. Park, and K. Kim, "Effects of Interface Trap Generation and Annihilation of the Data Retention Characteristics of Flash Memory Cells," IEEE Transactions of Device and Materials Reliability Vol. 4, No. 1, 2004, pp. 110-117.
-
(2004)
IEEE Transactions of Device and Materials Reliability
, vol.4
, Issue.1
, pp. 110-117
-
-
Lee, J.D.1
Choi, J.H.2
Park, D.3
Kim, K.4
-
6
-
-
0001070690
-
Atomic hydrogen-induced interface degradation of reoxidized-nitrided silicon dioxide on silicon
-
E. Cartier, D. A. Buchanan, and G. J. Dunn, "Atomic hydrogen-induced interface degradation of reoxidized-nitrided silicon dioxide on silicon," Applied Physics Letters, Vol. 64, No. 7, 1994, pp. 901-903.
-
(1994)
Applied Physics Letters
, vol.64
, Issue.7
, pp. 901-903
-
-
Cartier, E.1
Buchanan, D.A.2
Dunn, G.J.3
-
7
-
-
0033888110
-
Local lattice strain measurements in semiconductor devices by using convergent-beam electron diffraction
-
A. Toda, N. Ikarashi, and H. Ono, "Local lattice strain measurements in semiconductor devices by using convergent-beam electron diffraction," Journal of Crystal Growth, Vol. 210, Nos. 1-3, 2000, pp. 341-345.
-
(2000)
Journal of Crystal Growth
, vol.210
, Issue.1-3
, pp. 341-345
-
-
Toda, A.1
Ikarashi, N.2
Ono, H.3
-
8
-
-
0015048648
-
Piezoresistance in quantized conduction bands in silicon inversion layers
-
G. Dorda, "Piezoresistance in Quantized Conduction Bands in Silicon Inversion Layers," Journal of Applied Physics Vol. 42, No. 5, 1971, pp. 2053-2060.
-
(1971)
Journal of Applied Physics
, vol.42
, Issue.5
, pp. 2053-2060
-
-
Dorda, G.1
-
9
-
-
0000652792
-
Degradation of inversion layer electron mobility due to interface traps in metal-oxide-semiconductor transistors
-
T. Matsuoka, S. Taguchi, Q. D. M. Khosru, K. Taniguchi, and C. Hamaguchi, "Degradation of inversion layer electron mobility due to interface traps in metal-oxide-semiconductor transistors," Journal of Applied Physics Vol. 78 No. 5, 1995, pp. 3252-3257.
-
(1995)
Journal of Applied Physics
, vol.78
, Issue.5
, pp. 3252-3257
-
-
Matsuoka, T.1
Taguchi, S.2
Khosru, Q.D.M.3
Taniguchi, K.4
Hamaguchi, C.5
-
10
-
-
1142268148
-
Transport and exchange of hydrogen isotopes in silicon-device-related stacks
-
C. Krug, E. P. Gusev, E. A. Cartier, and T H. Zabel, "Transport and exchange of hydrogen isotopes in silicon-device-related stacks," Journal of Applied Physics Vol. 95, No. 3, 2004, pp. 887-895.
-
(2004)
Journal of Applied Physics
, vol.95
, Issue.3
, pp. 887-895
-
-
Krug, C.1
Gusev, E.P.2
Cartier, E.A.3
Zabel, T.H.4
-
12
-
-
84944614096
-
Study of silicon-silicon dioxide structure by electron spin resonance I
-
Y. Nishi, "Study of silicon-silicon dioxide structure by electron spin resonance I," Japan Journal of Applied Physics Vol. 10, No. 1, 1971, pp. 52-62.
-
(1971)
Japan Journal of Applied Physics
, vol.10
, Issue.1
, pp. 52-62
-
-
Nishi, Y.1
-
13
-
-
0019529879
-
Interface states and electron spin resonance centers in thermally oxidized (111) and (100) silicon wafers
-
E. H. Poindexter, P. J. Caplan, B. E. Deal, and R. R. Razouk, "Interface states and electron spin resonance centers in thermally oxidized (111) and (100) silicon wafers," Journal of Applied Physics Vol. 52, No. 2, 1981, pp. 879-884.
-
(1981)
Journal of Applied Physics
, vol.52
, Issue.2
, pp. 879-884
-
-
Poindexter, E.H.1
Caplan, P.J.2
Deal, B.E.3
Razouk, R.R.4
-
14
-
-
0001550526
-
29Si hyperfine interaction
-
29Si hyperfine interaction," Physical Review B, Vol. 58, No. 23, 1998, pp. 15801-15809.
-
(1998)
Physical Review B
, vol.58
, Issue.23
, pp. 15801-15809
-
-
Stesmans, A.1
Nouwen, B.2
Afanas'Ev, V.V.3
-
15
-
-
36449003907
-
The effects of thermal nitridation and reoxidation on the interfacial stress and structure of silicon gate dielectrics
-
J. T. Yount, P. M. Lenahan, and P. W. Wyatt, "The effects of thermal nitridation and reoxidation on the interfacial stress and structure of silicon gate dielectrics," Journal of Applied Physics Vol. 77, No. 2, 1995, pp. 699-705.
-
(1995)
Journal of Applied Physics
, vol.77
, Issue.2
, pp. 699-705
-
-
Yount, J.T.1
Lenahan, P.M.2
Wyatt, P.W.3
-
16
-
-
79955989147
-
2 gate dielectrics stacks
-
2 gate dielectrics stacks," Applied Physics Letters,' Vol. 81, No. 4, 2002, pp. 709-711.
-
(2002)
Applied Physics Letters
, vol.81
, Issue.4
, pp. 709-711
-
-
Houssa, M.1
Autran, J.L.2
Stesmans, A.3
Heyns, M.M.4
-
17
-
-
36449003773
-
Model for the substrate hole current based on thermionic hole emission from the anode during Fowler-Nordeim electron tunneling in n-channel metal-oxide-semiconductor field-effect transistors
-
K. Kobayashi, A. Teramoto, M. Hirayama, and Y. Fujita, "Model for the substrate hole current based on thermionic hole emission from the anode during Fowler-Nordeim electron tunneling in n-channel metal-oxide-semiconductor field-effect transistors," Journal of Applied Physics Vol. 77, No. 7, 1995, pp. 3277-3282.
-
(1995)
Journal of Applied Physics
, vol.77
, Issue.7
, pp. 3277-3282
-
-
Kobayashi, K.1
Teramoto, A.2
Hirayama, M.3
Fujita, Y.4
-
18
-
-
0000756527
-
Structure, energetics, and vibrational properties of Si-H bond dissociation in silicon
-
B. Turtle and C. G. Van de Walle, "Structure, energetics, and vibrational properties of Si-H bond dissociation in silicon," Physical Review B Vol. 59, No. 20, 1999, pp. 12884-12889.
-
(1999)
Physical Review B
, vol.59
, Issue.20
, pp. 12884-12889
-
-
Turtle, B.1
Van De Walle, C.G.2
|