High-energy Au implantation of GaAs at 16 K

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 484-486

  Lauck, R ^a   Wendler, E ^a   Wesch, W ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Damage; Electronic energy loss; GaAs; Ion irradiation

Indexed keywords

CRYSTAL LATTICES; ENERGY DISSIPATION; GOLD; ION BOMBARDMENT; ION IMPLANTATION; NUCLEAR ENERGY; TEMPERATURE DISTRIBUTION;

DAMAGE; ELECTRONIC ENERGY LOSS; GAAS; ION IRRADIATION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 28644448853     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.057     Document Type: Conference Paper

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