Mobility enhancement of polycrystalline-Si thin-film transistors using nanowire channels by pattern-dependent metal-induced lateral crystallization

Applied Physics Letters

Volumn 87, Issue 14, 2005, Pages 1-3

  Wu, Yung Chun ^a   Chang, Ting Chang ^b,c   Liu, Po Tsun ^a   Wu, Yuan Chun ^a   Chou, Cheng Wei ^a   Tu, Chun Hao ^a   Lou, Jen Chung ^a   Chang, Chun Yen ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS; SILICON;

FIELD-EFFECT MOBILITY; GRAIN-BOUNDARY DEFECTS; NANOWIRES;

THIN FILM TRANSISTORS;

EID: 28344443268     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2076436     Document Type: Article

References (15)

1. K. Nakazawa, J. Appl. Phys. 69, 1703 (1991).
2. T. J. King and K. C. Saraswat, IEEE Electron Device Lett. 13, 309 (1992).
3. H. Kuriyama, S. Kiyama, S. Noguchi, T. Kuahara, S. Ishida, T. Nohda, K. Sano, H. Iwata, S. Tsuda, and S. Nakano, Tech. Dig. - Int. Electron Devices Meet. 91, 563 (1991).
4. N. Yamauchi and R. Reif, J. Appl. Phys. 75, 3235 (1994).
5. H. J. Kim and J. S. Im, Appl. Phys. Lett. 68, 1513 (1996).
6. S. W. Lee and S. K. Joo, IEEE Electron Device Lett. 17, 160 (1996).
7. H. Wang, M. Chan, S. Jagar, V. M. C. Poon, M. Qin, Y. Wang, and P. K. Ko, IEEE Trans. Electron Devices 47, 1580 (2000).
8. Z. Meng, M. Wang, and M. Wong, IEEE Trans. Electron Devices 47, 404 (2000).
9. T. K. Kim, G. B. Kim, B. I. Lee, and S. K. Joo, IEEE Electron Device Lett. 21, 347 (1996).
10. V. W. C. Chan and P. C. H. Chan, IEEE Electron Device Lett. 22, 80 (2001).
11. T. Unagami and O. Kogure, IEEE Trans. Electron Devices 35, 1986 (1988).
12. Y. C. Wu, T. C. Chang, C. Y. Chang, C. S. Chen, C. H. Tu, P. T. Liu, H. W. Zan, and Y. H. Tai, Appl. Phys. Lett. 84, 3822 (2004).
13. H. Youman, ICSE Proceedings (1998).
14. F. V. Farmakis, J. Brini, G. Kamarinos, C. T. Angelis, C. A. Dimitriadis, and M. Miyasaka, IEEE Trans. Electron Devices 48, 701 (2001).
15. C. A. Dimitriadis, J. Appl. Phys. 88, 3624 (2000).