Optical emission characteristics of ablation plasma plumes during the laser-etching process of CdTe

Journal of Electronic Materials

Volumn 34, Issue 11, 2005, Pages 1428-1431

  Abe, K ^a   Eryu, O ^a   Nakashima, S ^a   Terai, M ^a   Kubo, M ^a   Niraula, M ^a   Yasuda, K ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Ablation plasma plume; CdTe; Etching; Laser ablation

Indexed keywords

CADMIUM COMPOUNDS; IRRADIATION; LASER ABLATION; PLASMA ETCHING;

ABLATION PLASMA PLUME; CDTE; OPTICAL EMISSIONS;

THERMAL PLUMES;

EID: 28144446225     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0201-7     Document Type: Article

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