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Volumn 96, Issue 11, 2004, Pages 6925-6927
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Optimization of AlGaN/GaN current aperture vertical electron transistor (CAVET) fabricated by photoelectrochemical wet etching
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Author keywords
[No Author keywords available]
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Indexed keywords
DOPING LAYER;
HOLE CONFINEMENT;
SURFACE TRAPS;
UNDERCUT ETCHING;
BAND STRUCTURE;
DOPING (ADDITIVES);
ELECTRIC POTENTIAL;
ELECTRONS;
ETCHING;
HOLE MOBILITY;
PHOTOELECTRICITY;
POLARIZATION;
SILICON;
ALUMINUM COMPOUNDS;
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EID: 28044445509
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1806281 Document Type: Article |
Times cited : (31)
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References (12)
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