A four-point surface conductivity probe suitable for in situ ultrahigh vacuum conductivity measurements

Review of Scientific Instruments

Volumn 68, Issue 4, 1997, Pages 1812-1813

  Wiegenstein, Christopher G ^a   Schulz, Kirk H ^a  

^a Michigan Technological University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC CONDUCTIVITY MEASUREMENT; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DOPING; SEMICONDUCTOR MATERIALS; SILICON WAFERS; SINGLE CRYSTALS; SPUTTER DEPOSITION; SURFACES; VACUUM APPLICATIONS;

FOUR POINT PROBE; INDIUM TIN OXIDE; MOLYBDENUM SULFIDE; SURFACE CONDUCTIVITY;

PROBES;

EID: 0031122761     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147968     Document Type: Article

References (11)

1. W. R. Runyan, Semiconductor Measurements and Instrumentation (McGraw-Hill, New York, 1975).
2. L. I. Maissel and R. Glang, Handbook of Thin Film Technology (McGraw-Hill, New York, 1970).
3. M. Ohring, The Materials Science of Thin Films (Academic, San Diego, 1992).
4. K. H. Schulz and D. F. Cox, J. Catal. 143, 464 (1993).
5. J. W. Erickson and S. Semancik, Surf. Sci. 187, L658 (1987).
6. D. F. Cox, T. B. Fryberger, and S. Semancik, Phys. Rev. B 38, 2072 (1988).
7. E. De Fresart, J. Darville, and J. M. Gilles, Appl. Surf. Sci. 11/12, 637 (1982).
8. J. W. Erickson, Rev. Sci. Instrum. 60, 502 (1989).
9. J. W. Erickson and S. Semancik, J. Vac. Sci. Technol. A 5, 115 (1987).
10. MACOR ceramic is manufactured by Dow Corning, and is available from any distributor selling machinable ceramic materials.
11. The spring loaded pins used in our design are available from Everett Charles Technologies, 700 E. Harrison Avenue, Pomona, California 91767 (909-625-5551).