XRD analysis of strained Ge-SiGe heterostructures on relaxed SiGe graded buffers grown by hybrid epitaxy on Si(0 0 1) substrates

Materials Science and Engineering: B

Volumn 124-125, Issue SUPPL., 2005, Pages 123-126

  Franco, N ^a   Barradas, N P ^a,b   Alves, E ^a,b   Vallera A M ^c   Morris, R J H ^d   Mironov, O A ^e   Parker, E H C ^d  

^a INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^b CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

^c UNIVERSITY OF LISBON   (Portugal)

^d UNIVERSITY OF WARWICK   (United Kingdom)

^e CHULALONGKORN UNIVERSITY   (Thailand)

Author keywords

Ge SiGe heterostructures; Reciprocal space maps (RSM); X ray diffraction (XRD)

Indexed keywords

ANNEALING; NONDESTRUCTIVE EXAMINATION; SILICON; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

RECIPROCAL SPACE MAPS (RSS); RUTHERFORD BACKSATTERING (RBS); SOLID-SOURCE (SS);

HETEROJUNCTIONS;

EID: 27944476985     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2005.08.087     Document Type: Conference Paper

References (13)

1. K.D. Chtcherbatchev, A.D. Sequeira, N. Franco, N.P. Barradas, M. Myronov, O.A. Mironov, and E.H.C. Parker Mater. Sci. Eng. B 91-92 2002 453
2. E.P. O'Reilly Semicond. Sci. Technol. 4 1989 121
3. M.L. Lee, E.A. Fitzgerald, M.T. Bulsara, M.T. Currie, and A. Lochtefeld J. Appl. Phys. 97 2005 011101
4. A.D. Sequeira, N. Franco, and J. Neves Mater. Sci. Forum 378-381 2001 206
5. N.P. Barradas, C. Jeynes, and R.P. Webb Appl. Phys. Lett. 71 1997 291
6. E. Szilágyi, F. Pászti, and G. Amsel Nucl. Instrum. Methods B 100 1995 103
7. W.A. Brantley J. Appl. Phys. 44 1973 534
8. J.H. Li, V. Holy, G. Bauer, and F. Schäffler J. Appl. Phys. 82 1997 2881
9. P.F. Fewster Semicond. Sci. Technol. 8 1993 1915
10. R.J.H. Morris, T.J. Grasby, R. Hammond, M. Myronov, O.A. Mironov, D.R. Leadley, T.E. Whall, E.H.C. Parker, M.T. Currie, C.W. Leitz, and E.A. Fitzgerald Semicond. Sci. Technol. 19 2004 L106S
11. M.V. Fischetti, and S.E. Laux J. Appl. Phys. 80 1996 2234
12. Madhavi, V. Venkataraman, and Y.H. Xie J. Appl. Phys. 89 2001 2497
13. P.M. Mooney, J.L. Jordan-Sweet, J.O. Chu, and F.K. LeGoues Appl. Phys. Lett. 66 1995 26