SCOPUS 정보 검색 플랫폼

Volumn 21, Issue 4, 2003, Pages 1453-1458

Electron-beam lithography for thick refractive optical elements in SU-8

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; ELECTRON SCATTERING; LIGHT REFRACTION; PHOTORESISTS; SURFACE PROPERTIES;

REFRACTIVE OPTICAL ELEMENTS;

OPTICAL DEVICES;

EID: 0141681261 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1593639 Document Type: Conference Paper

Times cited : (19)

References (16)

1
- 84975664464
- Z. D. Popovic, R. A. Sprague, and G. A. Neville Connell, Appl. Opt. 27, 1281 (1988).
- (1988) Appl. Opt. , vol.27 , pp. 1281
- Popovic, Z.D.¹ Sprague, R.A.² Neville Connell, G.A.³

2
- 0000610014
- S. Haselbeck, H. Schreiber, J. Schwider, and N. Streibl, Opt. Eng. (Bellingham) 32, 1322 (1993).
- (1993) Opt. Eng. (Bellingham) , vol.32 , pp. 1322
- Haselbeck, S.¹ Schreiber, H.² Schwider, J.³ Streibl, N.⁴

3
- 0001471275
- T. R. Jay and M. B. Stern, Opt. Eng. (Bellingham) 33, 3552 (1994).
- (1994) Opt. Eng. (Bellingham) , vol.33 , pp. 3552
- Jay, T.R.¹ Stern, M.B.²

4
- 0141783230
- L. Erdmann and D. Efferenn, Opt. Eng. (Bellingham) 36, 1094 (1997).
- (1997) Opt. Eng. (Bellingham) , vol.36 , pp. 1094
- Erdmann, L.¹ Efferenn, D.²

5
- 0033330270
- P. C. H. Poon, L. G. Commander, D. R. Selviah, and M. G. Robinson, J. Opt. A, Pure Appl. Opt. 1, 133 (1999).
- (1999) J. Opt. A, Pure Appl. Opt. , vol.1 , pp. 133
- Poon, P.C.H.¹ Commander, L.G.² Selviah, D.R.³ Robinson, M.G.⁴

6
- 22944472810
- Z. L. Liau and H. J. Zeiger, J. Appl. Phys. 67, 2434 (1990).
- (1990) J. Appl. Phys. , vol.67 , pp. 2434
- Liau, Z.L.¹ Zeiger, H.J.²

7
- 0012055243
- Z. L. Liau, V. Diadiuk, J. N. Walpole, and D. E. Mull, Appl. Phys. Lett. 55, 97 (1989).
- (1989) Appl. Phys. Lett. , vol.55 , pp. 97
- Liau, Z.L.¹ Diadiuk, V.² Walpole, J.N.³ Mull, D.E.⁴

8
- 0021853592
- Z. L. Liau and J. N. Walpole, Appl. Phys. Lett. 46, 115 (1985).
- (1985) Appl. Phys. Lett. , vol.46 , pp. 115
- Liau, Z.L.¹ Walpole, J.N.²

9
- 0141448354
- Inc. of San Diego, CA
- High-energy beam-sensitive (HEBS) glass is a patented product of Canyon Materials, Inc. of San Diego, CA.
- High-energy Beam-sensitive (HEBS) Glass is a Patented Product of Canyon Materials

10
- 0032620399
- C. Gimkiewicz, D. Hagedorn, J. Jahns, E. B. Kley, and F. Thoma, Appl. Opt. 38, 2986 (1999).
- (1999) Appl. Opt. , vol.38 , pp. 2986
- Gimkiewicz, C.¹ Hagedorn, D.² Jahns, J.³ Kley, E.B.⁴ Thoma, F.⁵

11
- 0020980684
- M. T. Gale and K. Knop, Proc. SPIE 398, 347 (1983).
- (1983) Proc. SPIE , vol.398 , pp. 347
- Gale, M.T.¹ Knop, K.²

12
- 0029519296
- E.-B. Kley and B. Schnabel, Proc. SPIE 2640, 71 (1995).
- (1995) Proc. SPIE , vol.2640 , pp. 71
- Kley, E.-B.¹ Schnabel, B.²

13
- 0031221057
- H. Lorenz, M. Desont, M. Fahrni, N. LaBianca, P. Vettiger, and P. Renaud, J. Micromech. Microeng. 7, 121 (1997).
- (1997) J. Micromech. Microeng. , vol.7 , pp. 121
- Lorenz, H.¹ Desont, M.² Fahrni, M.³ LaBianca, N.⁴ Vettiger, P.⁵ Renaud, P.⁶

14
- 0035326281
- W. H. Wong and E. Y. B. Pun, J. Vac. Sci. Technol. B 19, 732 (2001).
- (2001) J. Vac. Sci. Technol. B , vol.19 , pp. 732
- Wong, W.H.¹ Pun, E.Y.B.²

16
- 0007140499
- L. I. Aparshina, S. V. Dubonos, S. V. Maksimov, A. A. Svintsov, and S. I. Zaitsev, J. Vac. Sci. Technol. B 15, 2298 (1997).
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2298
- Aparshina, L.I.¹ Dubonos, S.V.² Maksimov, S.V.³ Svintsov, A.A.⁴ Zaitsev, S.I.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.