Uncooled thermal infrared sensors: Recent status in microbolometers and their sensing materials

Sensor Letters

Volumn 3, Issue 3, 2005, Pages 194-205

  Noda, Minoru ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Dielectric bolometer; Ferroelectric; Focal Plane Arrays (FPA); Microbolometer; Micromachining; Pyroelectric; Resistive bolometer; Thermal infrared sensor; Uncooled

Indexed keywords

AMORPHOUS SILICON; BOLOMETERS; DIELECTRIC DEVICES; FERROELECTRIC MATERIALS; INFRARED DETECTORS; MICROMACHINING; PYROELECTRICITY; THERMAL EFFECTS; VANADIUM COMPOUNDS;

FOCAL PLANE ARRAY (FPA); MICROBOLOMETERS; RESISTIVE BOLOMETER; SENSING MATERIALS; UNCOOLED THERMAL INFRARED SENSORS; VANADIUM OXIDE;

CHEMICAL SENSORS;

EID: 27844587413     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2005.038     Document Type: Review

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