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Volumn 124-125, Issue SUPPL., 2005, Pages 504-507

Silicon nanoparticles in thermally annealed thin silicon monoxide films

(9) Szekeres, A a Nikolova, T a Paneva, A b Cziraki, A c Kovacs, Gy J d Lisovskyy, I e Mazunov, D e Indutnyy, I e Shepeliavyi, P e

a INSTITUTE OF SOLID STATE PHYSICS (Bulgaria)

b UNIVERSITY OF SOFIA (Bulgaria)

c EÖTVÖS LORÁND UNIVERSITY (Hungary)

d RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE (Hungary)

e INSTITUTE OF SEMICONDUCTOR PHYSICS (Ukraine)

Author keywords

Nano sized Si clusters; Spectral ellipsometry; Transmission electron microscopy; Vacuum evaporated SiO

Indexed keywords

DENSIFICATION; ELLIPSOMETRY; EVAPORATION; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON; SILICON COMPOUNDS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VACUUM;

NANO-INCLUSIONS; NANO-SIZED SI CLUSTERS; SPECTRAL ELLIPSOMETRY; VACUUM EVAPORATED SIO;

NANOSTRUCTURED MATERIALS;

EID: 27844489957 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2005.08.124 Document Type: Conference Paper

Times cited : (21)

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