Structural-phase transformations in SiOx films in the course of vacuum heat treatment

Semiconductors

Volumn 37, Issue 1, 2003, Pages 97-102

  Lisovskyy, I P ^a   Indutnyy, I Z ^a   Gnennyy, B N ^a   Lytvyn, P M ^a   Mazunov, D O ^a   Oberemok, A S ^a   Sopinskyy, N V ^a   Shepelyavyi, P E ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037273553     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1538546     Document Type: Article

References (26)

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