An overview of Si-based biosensors

Sensor Letters

Volumn 3, Issue 2, 2005, Pages 71-88

  Zhu, Ziqiang ^a   Zhang, Jian ^a   Zhu, Jianzhong ^a  

^a EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

Anti interference; Biosensors; CDNA chips; Clark oxygen electrode; Diamond thin film; Micro array electrodes; Micro optical electro machine system; Microelectronic process; Porous silicon; Silicon substrate

Indexed keywords

DIAMOND FILMS; DNA; ELECTRODES; ENZYME IMMOBILIZATION; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MOLECULES; OPTOELECTRONIC DEVICES; OXYGEN SENSORS; POROUS SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON SENSORS;

ANTI-INTERFERENCE; CLARK OXYGEN ELECTRODE; DIAMOND THIN FILM; MICRO ARRAY ELECTRODES; MICRO-OPTICAL-ELECTRO-MACHINE SYSTEM; SILICON SUBSTRATE; SILICON-BASED BIOSENSORS;

BIOSENSORS;

EID: 27844488663     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2005.012     Document Type: Review

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