Capacitive microsensors for biochemical sensing based on porous silicon technology

Sensors and Actuators, B: Chemical

Volumn 64, Issue 1-3, 2000, Pages 59-64

  Schoning, M J ^a,b   Kurowski, A ^c   Thust, M ^a   Kordos, P ^a   Schultze, J W ^c   Luth H ^a,d  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b AACHEN UNIVERSITY OF APPLIED SCIENCES   (Germany)

^c HEINRICH HEINE UNIVERSITY   (Germany)

^d RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Capacitive microsensor; EIS sensor; Microreference electrode; pH penicillin determination; Porous silicon

Indexed keywords

EID: 33645702805     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00484-0     Document Type: Article

References (11)

1. M. Thust, M.J. Schöning, S. Frohnhoff, R. Arens-Fischer, P. Kordos, H. Lüth, Porous silicon as a substrate material for potentiometric biosensors, Measurements Science and Technology 7 (1996) 26.
2. M.J. Schöning, F. Ronkel, M. Crott, M. Thust, J.W. Schultze, P. Kordos, H. Lüth, Miniaturization of potentiometric sensors using porous silicon technology, Electrochim. Acta 42 (20) (1997) 3185.
3. M.J. Schöning, Ü. Malkoc, M. Thust, A. Steffen, P. Kordos, H. Lüth, Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors, in: Technical Digest of 7th IMCS Conference, Beijing, China, July 27-30,1998, pp. 885-887.
4. S. Barret, F. Gaspard, R. Herino, M. Ligeon, F. Muller, I. Ronga, Porous silicon as a material in microsensor technology, Sens. Actuators, A 33 (1992) 19.
5. R.L. Smith, D.C. Scott, An integrated sensor for electrochemical measurements, IEEE Trans. Biomed. Eng. 33 (2) (1986) 83.
6. V. Lehmann, The physics of macropore formation in low doped n-type silicon, J. Electrochem. Soc. 40 (10) (1993) 2836.
7. V. Lehmann, W. Hönlein, H. Reisinger, A. Spitzer, H. Wendt, J. Willer, A novel capacitor technology based on porous silicon, Thin Solid Films 276 (1996) 138.
8. P. Bergveld, Development of an ion-sensitive solid-state device for neurophysiological measurements, IEEE Trans. Biomed. Eng. 17 (1970) 70.
9. A. Schwacke, Chronoamperometric determination of hydrogen peroxide in swimming pool water using an ultramicroelectrode array, Sens. Actuators, B 46 (1998) 242.
10. A. Vogel, J.W. Schultze, M. Küpper, A new microcell for electrochemical surface analysis and reactions, in: Electrochemical Microsystem Technology Conference, Tokyo, Japan, September 9-11, 1998, p. 90.
11. D.D. Perrin, B. Dempsey, Buffers for pH and Metal Ion Control, Chapman & Hall, London, 1974.