Fabrication and characterization of a new automotive air-to-fuel sensors based on Pt- and TiO2-doped Nb2O5 film deposited by IBED

Sensors and Actuators, B: Chemical

Volumn B46, Issue 3, 1998, Pages 180-185

  Zhu, Jianzhong ^a   Ren, Congxin ^a   Chen, Guoliang ^a   Mu, Haichuan ^a   Wu, Jiali ^a   Yu, Chunying ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; MOS DEVICES; NIOBIUM COMPOUNDS; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; STOICHIOMETRY; THIN FILMS;

AUTOMOTIVE AIR/FUEL (A/F) SENSORS; ION BEAM ENHANCED DEPOSITION (IBED) TECHNIQUES;

CHEMICAL SENSORS;

EID: 0032022749     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)