Miniaturization of potentiometric sensors using porous silicon microtechnology

Electrochimica Acta

Volumn 42, Issue 20-22, 1997, Pages 3185-3193

  Schoning M J ^a   Ronkel, F ^b   Crott, M ^a   Thust, M ^a   Schultze, J W ^b   Kordos, P ^a   Luth H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b HEINRICH HEINE UNIVERSITY   (Germany)

Author keywords

Biosensor; EIS structure; pH sensor; Porous silicon; Silicon based microsensors

Indexed keywords

BIOSENSORS; CAPACITANCE MEASUREMENT; ELECTROCHEMISTRY; ENZYME IMMOBILIZATION; ETCHING; PH SENSORS; POROUS SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SILICA; SILICON NITRIDE; SILICON SENSORS;

ELECTROCHEMICAL ETCHING; ELECTROLYTE INSULATOR SEMICONDUCTOR STRUCTURE;

POTENTIOMETRIC SENSORS;

EID: 0030719247     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0013-4686(97)00172-2     Document Type: Article

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