SCOPUS 정보 검색 플랫폼

Current Applied Physics

Volumn 6, Issue 2, 2006, Pages 243-247

Mechanical property of the low dielectric carbon doped silicon oxide thin film grown from MTMS/O2 source

(2) Yang, C S a Choi, C K a

a Jeju National University (South Korea)

Author keywords

Elastic modulus; Hardness; Low k; MTMS; SiOC( H) film

Indexed keywords

CARBON; ELASTIC MODULI; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; NANOSTRUCTURED MATERIALS; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

FLOW RATES; LOW-K; NANOINDENTATION; SIOH (-H) FILMS;

THIN FILMS;

EID: 27744545698 PISSN: 15671739 EISSN: None Source Type: Journal
DOI: 10.1016/j.cap.2005.07.049 Document Type: Conference Paper

Times cited : (16)

References (17)

1
- 0032162553
- T. Homma Mater. Sci. Eng. R23 1998 243
- (1998) Mater. Sci. Eng. , vol.23 , pp. 243
- Homma, T.¹

2
- 0037710433
- M. Morgen, E. Todd, J.H. Zhao, C. Hu, T. Cho, and P.S. Ho Ann. Rev. Mater. Sci. 30 2000 651
- (2000) Ann. Rev. Mater. Sci. , vol.30 , pp. 651
- Morgen, M.¹ Todd, E.² Zhao, J.H.³ Hu, C.⁴ Cho, T.⁵ Ho, P.S.⁶

3
- 0033339220
- S.W. Chung, J.H. Shin, N.H. Park, and J.W. Park Jpn. J. Appl. Phys. 38 1999 5214
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 5214
- Chung, S.W.¹ Shin, J.H.² Park, N.H.³ Park, J.W.⁴

4
- 0033356609
- S.W. Lim, Y. Shimogaki, Y. Nakano, K. Tada, and H. Komiyama J. Electrochem. Soc. 146 1999 4196
- (1999) J. Electrochem. Soc. , vol.146 , pp. 4196
- Lim, S.W.¹ Shimogaki, Y.² Nakano, Y.³ Tada, K.⁴ Komiyama, H.⁵

5
- 0033363296
- S.S. Han, H.R. Kim, and B.S. Bae J. Electrochem. Soc. 146 1999 3383
- (1999) J. Electrochem. Soc. , vol.146 , pp. 3383
- Han, S.S.¹ Kim, H.R.² Bae, B.S.³

6
- 0035535669
- K.S. Oh, S.Y. Jing, C.K. Choi, K.M. Lee, and H.J. Lee J. Korea Phys. Soc. 39 2001 291
- (2001) J. Korea Phys. Soc. , vol.39 , pp. 291
- Oh, K.S.¹ Jing, S.Y.² Choi, C.K.³ Lee, K.M.⁴ Lee, H.J.⁵

7
- 0033350149
- T.C. Chang, Y.S. Mor, S.M. Sze, Y.L. Yang, M.S. Feng, F.M. Pan, B.T. Dai, and C.Y. Chang J. Electrochem. Soc. 146 1999 3802
- (1999) J. Electrochem. Soc. , vol.146 , pp. 3802
- Chang, T.C.¹ Mor, Y.S.² Sze, S.M.³ Yang, Y.L.⁴ Feng, M.S.⁵ Pan, F.M.⁶ Dai, B.T.⁷ Chang, C.Y.⁸

8
- 0001470318
- J.Y. Kim, M.S. Hwang, Y.H. Kim, H.J. Kim, and Y. Lee J. Appl. Phys. 90 2001 2469
- (2001) J. Appl. Phys. , vol.90 , pp. 2469
- Kim, J.Y.¹ Hwang, M.S.² Kim, Y.H.³ Kim, H.J.⁴ Lee, Y.⁵

9
- 0036002398
- Y.H. Kim, H.J. Kim, J.Y. Kim, and Y. Lee J. Korea Phys. Soc. 40 2002 94
- (2002) J. Korea Phys. Soc. , vol.40 , pp. 94
- Kim, Y.H.¹ Kim, H.J.² Kim, J.Y.³ Lee, Y.⁴

10
- 0035973396
- C.S. Yang, K.S. Oh, J.Y. Ryu, D.C. Kim, J.S. Yong, C.K. Choi, H.J. Lee, S.H. Um, and H.Y. Chang Thin Solid Films 390 2001 113
- (2001) Thin Solid Films , vol.390 , pp. 113
- Yang, C.S.¹ Oh, K.S.² Ryu, J.Y.³ Kim, D.C.⁴ Yong, J.S.⁵ Choi, C.K.⁶ Lee, H.J.⁷ Um, S.H.⁸ Chang, H.Y.⁹

11
- 0035649070
- S.Y. Jing, C.K. Choi, and H.J. Lee J. Korea Phys. Soc. 39 2001 S302
- (2001) J. Korea Phys. Soc. , vol.39
- Jing, S.Y.¹ Choi, C.K.² Lee, H.J.³

12
- 0033898284
- K. Aumaille, C. Vallee, A. Granier, A. Goullet, F. Gaboriau, and G. Turban Thin Solid Films 359 2000 188
- (2000) Thin Solid Films , vol.359 , pp. 188
- Aumaille, K.¹ Vallee, C.² Granier, A.³ Goullet, A.⁴ Gaboriau, F.⁵ Turban, G.⁶

13
- 0347682197
- X. Jun, C.S. Yang, H.R. Jang, and C.K. Choi J. Electrochem. Soc. 150 2003 F206
- (2003) J. Electrochem. Soc. , vol.150
- Jun, X.¹ Yang, C.S.² Jang, H.R.³ Choi, C.K.⁴

14
- 27744479263
- A. Laskarakis, S. Logothetids, C. Charitids, M. Gioti, and Y. Panayiotatos Diamond Related Mater. 10 2001 1180
- (2001) Diamond Related Mater. , vol.10 , pp. 1180
- Laskarakis, A.¹ Logothetids, S.² Charitids, C.³ Gioti, M.⁴ Panayiotatos, Y.⁵

15
- 0037255350
- S.Y. Lee, Y.B. Kim, and J.S. Byun J. Electrochem. Soc. 150 2003 G58
- (2003) J. Electrochem. Soc. , vol.150
- Lee, S.Y.¹ Kim, Y.B.² Byun, J.S.³

16
- 0036687223
- J.M. Park, and S.W. Rhee J. Electrochem. Soc. 149 2002 F92
- (2002) J. Electrochem. Soc. , vol.149
- Park, J.M.¹ Rhee, S.W.²

17
- 2942655791
- C.S. Yang, Y.H. Yu, K.M. Lee, H.J. Lee, and C.K. Choi Thin Solid Films 435 2003 166
- (2003) Thin Solid Films , vol.435 , pp. 166
- Yang, C.S.¹ Yu, Y.H.² Lee, K.M.³ Lee, H.J.⁴ Choi, C.K.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.