Microfabrication of single-crystal silicon multiple torsional oscillators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3875, Issue , 1999, Pages 104-112

  Chabot, Michelle D ^a   Markert, John T ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ETCHING; INTERFEROMETRY; MICROELECTRONIC PROCESSING; NATURAL FREQUENCIES; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; SEMICONDUCTOR DOPING; SILICON WAFERS; SINGLE CRYSTALS;

FIBER OPTIC INTERFEROMETRY; MULTIPLE TORSIONAL OSCILLATORS; NUCLEAR MAGNETIC RESONANCE FORCE MICROSCOPY;

CRYSTAL OSCILLATORS;

EID: 0033319990     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)