Spurious resonance free bulk acoustic wave resonators

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 84-87

  Kaitila, J ^a   Ylilammi, M ^b   Ellä, Juha ^c   Aigner, R ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^c NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; BANDWIDTH; BOUNDARY CONDITIONS; COSTS; MATRIX ALGEBRA; MICROMACHINING; PIEZOELECTRIC DEVICES; SUBSTRATES; THIN FILMS; WAVE FILTERS;

INSERTION LOSS (IR); LAMB WAVES; LATERAL DISPLACEMENT FIELDS; SOLIDLY MOUNTED RESONATORS (SMR);

ACOUSTIC BULK WAVE DEVICES;

EID: 4143071647     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. J. Kaitila et. al.: to be published.
2. S. H. Chang, N. N. Rogacheva and C. C. Chou, "Analysis of Methods for Determining Electromechanical Coupling Coefficients of Piezoelectric Elements", IEEE Trans. on Ultrasonics, Ferroelectrics, and Freqency Control, Vol. 42, No. 4, July 1995, pp. 630-640.
3. J. V. Knuuttila, P. T. Tikka and M. M. Salomaa, "Scanning Michelson Interferometer for Imaging Surface Acoustic Wave Fields", Optics Letters, Vol. 25, No. 9, 2000, pp. 613-615.