Electrostatical coupling-spring for micro-mechanical filtering applications

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 3, Issue , 2003, Pages

  Galayko, Dimitri ^b   Kaiser, Andreas ^b   Buchaillot, Lionel ^b   Collard, Dominique ^a   Combi, Chantal ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; BANDWIDTH; ELECTRIC POTENTIAL; RESONATORS; SIGNAL PROCESSING; SPRINGS (COMPONENTS); STIFFNESS; TRANSDUCERS;

SIGNAL NODES;

ELECTROMECHANICAL FILTERS;

EID: 0038082327     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Kun Wang, Clark T.-C. Nguyen, "High-order medium frequency ...", JMEMS, vol. 8, no. 4, december 1999
2. Frank D. Bannon, III, John R. Clark, Clark T.-C. Nguyen, "High frequency microelectromechanical IF filters", IEEE Journal of Solid-State Circuits, Vol. 35, no. 4, april 2000.
3. D. Galayko et al. "Design, realisation and test of micro-mechanical resonators...", JMM, IoP, 13 (2003), 134-140
4. J. R. Clark, W.-T. Hsu, and C. T.-C. Nguyen, "High-Q VHF micromechanical... " Int. Electron Devices Meeting, USA, 2000.
5. D. Galayko, Filtres microélectromécaniques micro-usines...", PhD dissertation, USTL (Lille, France), 2002