MEMS variable optical attenuator with linear attenuation using normal fibers

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1171-1174

  Cai, H ^a   Zhang, X M ^a   Lu, C ^a   Liu, A Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

MEMS; Optical attenuator; VOA

Indexed keywords

ELLIPTICAL MIRROR; OPTICAL ATTENUATOR; REFLECTOR; VOA;

ELECTROMAGNETIC WAVE ATTENUATION; INSERTION LOSSES; LIGHT POLARIZATION; LIGHT REFLECTION; MICROMACHINING; OPTICAL DEVICES; SINGLE MODE FIBERS;

MICROELECTROMECHANICAL DEVICES;

EID: 27544496288     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497286     Document Type: Conference Paper

References (9)

1. C. Marxer, P. Griss, N. F. De Tooij, "A variable optical attenuator based on silicon micromechanics," IEEE Photonics Technology Letters 11, 233-5 (1999).
2. A. Q. Liu, X. M. Zhang, C. Lu, F. Wang, C. Lu and Z. S. Liu "Optical and mechanical models for a variable optical attenuator using a miromirror drawbridge, J. Micromechanics and Microenging, 13, 400-11 (2003).
3. K. Isamoto, K. Kato, A. Morosawa, C. Changho, H. Fujita, "A 5-V operated MEMS variable optical attenuator by SOI bulk micromaching," IEEE J. Selected Topics in Quantum Electronics, 10, no. 3, 570-8 (2004).
4. C. -H Kim, N. Park, and Y. -K Kim, "MEMS reflective type variable optical attenuator using off-axis misalignment," 2002 IEEE/LEOS Int. Conf. on Optical MEMS, Lugano, Switzerland, 55-6 (2002).
5. R. R. A. Syms, H. Zou, J. Staff, and H. Veladi, "Sliding-blade MEMS iris and variable optical attenutor," J. Micromechanics and Microenging, 14, 1700-10 (2004).
6. X. M. Zhang, A. Q. Liu, C. Lu, and D. Y. Tang, "MEMS Variable Optical Attenuator using Low Driving Voltage for DWDM Systems," Electronics Letter, 38, no. 8, 382-3 (2002).
7. T. S. Lim, C. H. Ji, C. H. Oh, H. Kwon, Y. Yee, and J. U. Bu, "Electrostatic MEMS variable optical attenuator with rotating folded micromirror," IEEE J. Selected Topics in Quantum Electronics, 10, no. 3, 558-62 (2004).
8. J. E. Ford, J. A. Walker, D. S. Greywall and K.W. Gpossen, "Micromechanical fiber-optic attenuator with 3 μs response," J. Lightwave Technology, 16, 1663-70 (1998).
9. J. Li, Q. X. Zhang and A. Q. Liu, "Advanced fiber opical switches using deep RIE (DRIE) fabrication," Sensors and Actuators A, 102, 286-95 (2003).