A high-temperature thermopile fabrication process for thermal flow sensors

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 575-578

  Buchner, Rainer ^a   Rohloff, Klaus ^a   Benecke, Wolfgang ^a   Lang, Walter ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

Calorimeter; Thermal flow sensor; Thermopile

Indexed keywords

HIGH TEMPERATURE PASSIVATION; THERMAL FLOW SENSOR; THERMOPILE; THERMOPILE FABRICATION PROCESS;

CALORIMETERS; CHEMICAL VAPOR DEPOSITION; FABRICATION; FLOW MEASUREMENT; MICROPROCESSOR CHIPS; PASSIVATION; SENSITIVITY ANALYSIS; SILICON NITRIDE; THERMAL EFFECTS;

SENSORS;

EID: 27544491744     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496482     Document Type: Conference Paper

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