Numerical algorithm for quasi-static nonlinear simulation of touch-mode actuators with complex geometries and pre-stressed materials

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 2119-2122

  Oberhammer, Joachim ^a,b   Liu, Ai Qun ^b   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Curved electrode actuator; MEMS simulation; Quasi static modeling; Touch mode actuator

Indexed keywords

CURVED-ELECTRODE ACTUATORS; MEMS SIMULATIONS; QUASI-STATIC MODELING; TOUCH-MODE ACTUATORS;

ALGORITHMS; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; NONLINEAR SYSTEMS; OPTIMIZATION; PRESTRESSED MATERIALS; THIN FILMS;

ELECTROSTATIC ACTUATORS;

EID: 27544477829     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497522     Document Type: Conference Paper

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