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Physica Status Solidi C: Conferences

Volumn 2, Issue 7, 2005, Pages 2551-2554

Combinatorial optimization of Ti/Al/Ti/Au ohmic contacts to n-GaN

(7) Davydov, A V a Motayed, A b Boettinger, W J a Gates, R S a Xue, Q Z c Lee, H C c Yoo, Y K c

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b School of Engineering (United States)

c Intematix Corporation (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELECTRIC CONDUCTIVITY; GALLIUM NITRIDE; GOLD; ION BEAMS; MICROSTRUCTURE; MORPHOLOGY; RAPID THERMAL ANNEALING; SPUTTER DEPOSITION; THIN FILMS; TITANIUM; X RAY DIFFRACTION ANALYSIS;

COMBINATORIAL ION-BEAM SPUTTERING (CIBS); COMBINATORIAL LIBRARY; CONTACT RESISTIVITY;

OHMIC CONTACTS;

EID: 27344447579 PISSN: 16101634 EISSN: None Source Type: Conference Proceeding
DOI: 10.1002/pssc.200461605 Document Type: Conference Paper

Times cited : (24)

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