Crystallization of Al 2O 3 and its effects on the mechanical properties in TiN/Al 2O 3 nanomultilayers

Journal of Applied Physics

Volumn 98, Issue 7, 2005, Pages

  Wei, Lun ^a   Kong, Ming ^a   Dong, Yunshan ^a   Li, Geyang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS STRUCTURES; ENERGY DISPERSIVE X-RAY SPECTROSCOPY; GROWTH STRUCTURES; NANOMULTILAYERS;

CRYSTALLIZATION; ELASTIC MODULI; ENERGY DISPERSIVE SPECTROSCOPY; EPITAXIAL GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MICROHARDNESS; MULTILAYERS; NANOSTRUCTURED MATERIALS; PHASE COMPOSITION; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

TITANIUM COMPOUNDS;

EID: 27144557964     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2067687     Document Type: Article

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