A tailored optimization strategy for PDE-based design: Application to a CVD reactor

Computers and Chemical Engineering

Volumn 28, Issue 3, 2004, Pages 291-302

  Itle, G C ^a   Salinger, A G ^b   Pawlowski, R P ^b   Shadid, J N ^b   Biegler, L T ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

CVD reactor; Finite element methods; Gallium nitride; PDE constrained optimization; SQP methods

Indexed keywords

ALGORITHMS; CHEMICAL VAPOR DEPOSITION; NONLINEAR PROGRAMMING; OPTIMIZATION;

STABILITY ANALYSIS;

PARTIAL DIFFERENTIAL EQUATIONS;

GALLIUM;

CHEMICAL VAPOR DEPOSITION; COMPUTER CONTROL; DIFFERENTIAL EQUATION; FINITE ELEMENT METHOD; OPTIMIZATION; REACTOR;

ALGORITHM; ARTICLE; FILM; MODEL; NONLINEAR SYSTEM; PROCESS OPTIMIZATION; REACTOR; STEADY STATE; VAPOR;

EID: 0742269664     PISSN: 00981354     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0098-1354(03)00190-X     Document Type: Article

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