Anomalous cystalline structure of epitaxial Pb(Zr,Ti)O3 films grown on (100)Pt/(100)MgO by RF-magnetron sputtering

Journal of the Korean Physical Society

Volumn 42, Issue SUPPL., 2003, Pages

  Kanno, Isaku ^a   Kotera, Hidetoshi ^a   Wasa, Kiyotaka ^b   Matsunaga, Toshiyuki ^c   Kamada, Takeshi ^c   Takayama, Ryouichi ^c  

^a KYOTO UNIVERSITY   (Japan)

^b YOKOHAMA CITY UNIVERSITY   (Japan)

^c PANASONIC CORPORATION   (Japan)

Author keywords

Crystalline structure; PZT; Sputtering; Thin films

Indexed keywords

EID: 26544448280     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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