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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 5 A, 2000, Pages 2859-2862

Cantilever type lead zirconate titanate microactuator utilizing ruthenium oxide

(6) Lee, Sun Ho a Jeon, Min Seok a Hong, Kyung I I a Lee, Jin Won a Kim, Chang Kyung a Choi, Duck Kyun a

a Hanyang University (South Korea)

Author keywords

Cantilever beam; Microactuator; Microelectromechanical system; Pb(Zr,Ti)o3; Ruo2

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTRODES; LEAD COMPOUNDS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; RUTHENIUM COMPOUNDS; STIFFNESS;

LEAD ZIRCONATE TITANATE; WET ETCHING;

MICROACTUATORS;

EID: 0033723405 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.2859 Document Type: Article

Times cited : (11)

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