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Volumn 15, Issue 5, 2004, Pages 435-440

Non-contact nanoparticle removal with laser induced plasma pulses

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATMOSPHERIC HUMIDITY; CRYOGENICS; IRRADIATION; LASERS; MATHEMATICAL MODELS; PLASMAS; POLYSTYRENES; POLYVINYLIDENE CHLORIDES; THERMAL EXPANSION;

EID: 2642520434     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/5/006     Document Type: Article
Times cited : (41)

References (17)
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    • Lee J, Imen K and Allen S D 1991 A comparison of ns and ps steam laser cleaning of Si surfaces Appl. Phys. Lett. 58 203
    • (1991) Appl. Phys. Lett. , vol.58 , pp. 203
    • Lee, J.1    Imen, K.2    Allen, S.D.3
  • 8
    • 0033751916 scopus 로고    scopus 로고
    • Laser-based transient surface acceleration of thermoelastic layers
    • Cetinkaya C, Li C and Wu J 2000 Laser-based transient surface acceleration of thermoelastic layers J. Sound Vib. 231 195
    • (2000) J. Sound Vib. , vol.231 , pp. 195
    • Cetinkaya, C.1    Li, C.2    Wu, J.3
  • 9
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    • Lin J and Cetinkaya C 2003 Potential thermo-mechanical substrate damage in nanoparticle removal with pulsed lasers J. Adhes. Sci. Technol. 17 91
    • (2003) J. Adhes. Sci. Technol. , vol.17 , pp. 91
    • Lin, J.1    Cetinkaya, C.2
  • 10
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    • Nanoparticle removal from flat substrates with pulsed-laser induced plasma and shock waves
    • Cetinkaya C, Vanderwood R and Rowell M 2002 Nanoparticle removal from flat substrates with pulsed-laser induced plasma and shock waves J. Adhes. Sci. Technol. 16 1201
    • (2002) J. Adhes. Sci. Technol. , vol.16 , pp. 1201
    • Cetinkaya, C.1    Vanderwood, R.2    Rowell, M.3
  • 11
    • 0035356129 scopus 로고    scopus 로고
    • Removal of small particles on silicon wafer by laser-induced airborne plasma shock waves
    • Lee J M and Watkins K G 2001 Remov al of small particles on silicon wafer by laser-induced airborne plasma shock waves J. Appl. Phys. 89 6496
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    • Lee, J.M.1    Watkins, K.G.2
  • 12
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    • Thermal effects and power enhancement in a He-Ne optical maser
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    • Hooper T and Cetinkaya C 2003 Efficiency studies of particle removal with pulsed-laser induced plasma J. Adhes. Sci. Technol. 17 763
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    • Non-contact removal of 60 nm latex particles from silicon wafers with laser induced plasma
    • submitted
    • Cetinkaya C and Varghese I 2004 Non-contact removal of 60 nm latex particles from silicon wafers with laser induced plasma Adhes. Sci. Technol. submitted
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.