SCOPUS 정보 검색 플랫폼

Journal of Adhesion Science and Technology

Volumn 17, Issue 6, 2003, Pages 763-776

Efficiency studies of particle removal with pulsed-laser induced plasma

(2) Hooper Jr , Thomas a Cetinkaya, Cetin a

a Clarkson University (United States)

Author keywords

Laser cleaning; Laser ultrasonics; Micro contamination; Micro manufacturing; Nano manufacturing; Particle removal

Indexed keywords

MICROELECTRONIC PROCESSING; NANOTECHNOLOGY; PLASMAS; PULSED LASER APPLICATIONS; SILICON WAFERS; SURFACE TREATMENT; ULTRASONIC APPLICATIONS; LASER PRODUCED PLASMAS; MANUFACTURE; MICROELECTRONICS; POLYSTYRENES; PULSED LASERS; SEMICONDUCTOR LASERS; SILICA;

LASER CLEANING; MICRO-CONTAMINATION; MICRO-MANUFACTURING; NANO-MANUFACTURING; PARTICLE REMOVAL; PULSED LASER INDUCED PLASMA;

CLEANING; SUBSTRATES;

LASER CLEANING; LASER ULTRASONICS; MICRO-CONTAMINATION; MICRO-MANUFACTURING; NANO-MANUFACTURING; PARTICLE REMOVAL;

EID: 0038141323 PISSN: 01694243 EISSN: None Source Type: Journal
DOI: 10.1163/156856103321645149 Document Type: Article

Times cited : (32)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.