Maskless patterning of various kinds of metals onto porous silicon

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 8, 2005, Pages 1571-1575

  Sasano, J ^a   Schmuki, P ^b   Sakka, T ^a   Ogata, Y H ^a  

^a KYOTO UNIVERSITY   (Japan)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MASKLESS PATTERNING; POSITION-SELECTIVE ELECTRODEPOSITION;

COPPER; ELECTROCHEMISTRY; PLATING; SPEECH INTELLIGIBILITY;

POROUS SILICON;

EID: 25444485744     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200461186     Document Type: Conference Paper

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