Improving the resolution and the uniformity of AFM tip induced oxide patterns with pulsed voltages

Applied Surface Science

Volumn 230, Issue 1-4, 2004, Pages 340-344

  Shen, Ziyong ^a   Sun, Hui ^a   Hou, Shimin ^a   Zhao, Xingyu ^a   Xue, Zengquan ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Atomic force microscopy; Oxide patterns; Pulsed voltages; Titanium film

Indexed keywords

ATMOSPHERIC HUMIDITY; ELECTRIC FIELDS; ELECTRIC POTENTIAL; LITHOGRAPHY; OPTICAL RESOLVING POWER; OXIDATION; OXIDES;

OXIDE PATTERNS; PULSED VOLTAGES; SINGLE ELECTRON TRANSISTORS (SET); TITANIUM FILMS;

ATOMIC FORCE MICROSCOPY;

EID: 2542494379     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.02.051     Document Type: Article

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