Composition analysis of NiTi thin films sputtered from a mosaic target: Synthesis and simulation

Smart Materials and Structures

Volumn 14, Issue 5, 2005, Pages

  Abhilash, V ^a   Sumesh, M A ^a   Mohan, S ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MAGNETRON SPUTTERING; MONTE CARLO METHODS; NICKEL ALLOYS; SYNTHESIS (CHEMICAL); X RAY ANALYSIS;

MOSAIC PATTERN; MOSAIC TARGET; SPUTTER YIELDS; SUBSTRATE-TARGET DISTANCES;

THIN FILMS;

EID: 25144512027     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/14/5/023     Document Type: Conference Paper

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