NiTi shape memory alloy thin films: Composition control using optical emission spectroscopy

Thin Solid Films

Volumn 283, Issue 1-2, 1996, Pages 61-66

  Bendahan, Marc ^a   Seguin, Jean Luc ^a   Canet, Pierre ^a   Carchano, Hervé ^a  

^a Fac Sci de S Jerome Serv A62   (France)

Author keywords

Glow discharge optical spectroscopy; Nickel; Sputtering; Titanium

Indexed keywords

COMPOSITION; EMISSION SPECTROSCOPY; HEAT TREATMENT; LIGHT EMISSION; NICKEL ALLOYS; PHASE TRANSITIONS; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION; SPUTTERING; TEMPERATURE;

COMPOSITION CONTROL; NICKEL TITANIUM ALLOYS; OPTICAL EMISSION SPECTROSCOPY; SPUTTERING GAS PRESSURE; THERMALIZATION; TRANSFORMATION TEMPERATION;

THIN FILMS;

EID: 0030234734     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08254-9     Document Type: Article

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