Development of humidity sensors based on nanostructured carbon films

Sensors and Actuators, B: Chemical

Volumn 111-112, Issue SUPPL., 2005, Pages 140-144

  Miglio, S ^a,c   Bruzzi, M ^a,c   Scaringella, M ^a,c   Menichelli, D ^a,c   Leandri, E ^a   Baldi, A ^a   Bongiorno, G ^b   Piseri, P ^b   Milani, P ^b  

^a INFM   (Italy)

^b UNIVERSITY OF MILAN   (Italy)

^c UNIVERSITY OF FLORENCE   (Italy)

Author keywords

Capacitive humidity sensors; Nanostructured carbon; Supersonic cluster beam deposition

Indexed keywords

CAPACITIVE HUMIDITY SENSORS; ELECTRONIC READ-OUT SYSTEMS; NANOSTRUCTURED CARBON; SUPERSONIC CLUSTER BEAM DEPOSITION;

ATMOSPHERIC HUMIDITY; CHEMICAL SENSORS; DYNAMIC RESPONSE; ELECTRIC IMPEDANCE; HYSTERESIS; THIN FILMS;

CARBON;

EID: 25144473588     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.06.044     Document Type: Conference Paper

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